Multilayer film diffraction grating

摘要

Problem to be solved: to provide a diffraction grating having high diffraction efficiency.In the soft X-ray region where the target electromagnetic wave (electromagnetic wave to be used) does not penetrate deeply into the surface material due to the total reflection conditionA plurality of film pairs consisting of a low density material layer and a high density material layer are formed on a diffraction grating surface having a metal film or the like commonly used as a reflection film.The diffraction efficiency for light with wide energy in the soft X-ray region is improved by depositing with the optimum period length to diffract the light of energy penetrating deeply with the film pair.Diagram