Adjustment possible modulation transfer function (MTF) using, the system in order to perceive and the

摘要

The variable modulation transfer function which uses the variable gate voltage source 310 in order to use in inspection of the test piece (MTF) one example is disclosed. With the execution form which relates to this invention variable gate voltage is impressed in each pixel of the sensor, MTF of pixel is adjusted by impressing variable gate voltage in each pixel. With MTF adjustment, the adverse effect which it occurs while inspecting the aliasing and the like is improved, contrast is maintained.