TEMPLATE, METHOD FOR PRODUCING THE TEMPLATE, CRYSTAL GROWN USING THE TEMPLATE, AND METHOD AND APPARATUS FOR PRODUCING THE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To obtain a template having improved warpage, and to suppress a crack of a crystal grown on the template to improve the quality of the crystal.;SOLUTION: The template is produced by a first step of providing a mask material on an upper surface of a substrate of a template 1 and a second step of growing a crystal thin film on the upper surface of the substrate. Since the crystal thin film does not grow on the mask material, the crystal thin film can be divided without forming a groove in the substrate, thus capable of obtaining the template having improved warpage. Further, when a thick film GaN crystal is grown on the template, the GaN crystal is not formed such that the GaN crystal is fitted into the substrate since there is no groove in the substrate of the template. Therefore, a crack of the GaN crystal grown on the template can be suppressed, and the quality of the GaN crystal can be improved.;COPYRIGHT: (C)2011,JPO&INPIT