LASER IRRADIATION APPARATUS, LASER BEAM MACHINING APPARATUS AND METHOD OF MANUFACTURING FLAT PANEL DISPLAY

摘要

PPROBLEM TO BE SOLVED: To provide a laser irradiation apparatus which controls irradiation intensity (energy intensity) distribution in the irradiation range of a laser beam, and to provide a laser beam machining apparatus and a method of manufacturing a flat panel display. PSOLUTION: The laser irradiation apparatus includes: a laser beam source 4; a direction control part 9 for controlling the direction of the laser beam introduced from the laser beam source; a scanning part 10 for performing a linear conversion in a pseudo manner on the surface to be irradiated by scanning the laser beam which is introduced through the direction control part; a scanning control part 13 which changes the form of scanning by making the direction control part 9 and the scanning part 10 cooperate; and an irradiation intensity control part 6 for controlling the irradiation intensity distribution in the irradiation range by controlling the laser beam to a prescribed position in the scanning range. PCOPYRIGHT: (C)2011,JPO&INPIT