METHOD FOR MANUFACTURING BLOCK COPOLYMER THIN FILM HAVING MICROPHASE SEPARATION STRUCTURE OF ONE AXIS HORIZONTAL ORIENTATION

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a block copolymer thin film having a microphase separation structure of one axis horizontal orientation in a simple process even in a big area.;SOLUTION: A solid material comprising a fluorine polymer is rubbed against the surface of a solid base material 1 to form a plurality of streaky fluorine polymer layers 2 on the surface of the solid base material 1, and after a copolymer solution containing a block copolymer where two kinds of block chains mutually incompatible are chemically bonded is coated on the surface of the solid base material 1 where the fluorine copolymer layer 2 is formed, the block copolymer thin film 3 is obtained by performing heat treatment thereon.;COPYRIGHT: (C)2011,JPO&INPIT