METHOD OF FABRICATING OPTICAL WAVEGUIDE CORE, METHOD OF FABRICATING OPTICAL WAVEGUIDE, OPTICAL WAVEGUIDE AND OPTOELECTRIC COMPOSITE WIRING BOARD

摘要

PROBLEM TO BE SOLVED: To provide a method of fabricating optical waveguide core, efficiently fabricating an optical waveguide core having inclined surfaces of a prescribed angle, and selectively forming a metal film on the inclined surface.;SOLUTION: The method of fabricating optical waveguide core includes: a core part forming step of forming a core part 13 on the surface of a clad layer 12 formed on a substrate 11; a recessed part forming step of forming a vertical surface 15a substantially vertical to a glad layer 12 and a recessed part 15 disposed opposite the vertical surface 15a having inclined surfaces 15b for reflecting light, which has vertical surfaces 15a substantially vertical to the clad layer 12 for reflecting light so as to guide light made incident from the opposite side of the clad layer 12 into the core part 13 or make light emitted from the core part 13 effluent to the opposite side; a metal layer forming step of forming a metal layer 16 on the recessed part 15; and a metal layer removing step of leaving a metal layer 16b at least on the inclined surface 15b by selectively removing a metal layer 16a formed on the vertical surface 15a.;COPYRIGHT: (C)2011,JPO&INPIT