The optical device in order to irradiate to suffering measurement ones, and the interference measurement equipment in order to measure the aspect of suffering measurement ones

摘要

This invention had the optical device (200), suffering measurement ones (280) the surface (281,282) the interference measurement equipment for measurement (300) it regards. The aforementioned optical device (200), the measurement beam of the 1st optical path and the measurement beam of the 2nd optical path the aspect of aforementioned suffering measurement ones (281,282) bimusupuritsuta in order to make advance (250) it possesses two mirrors (260,270) with. The optical path which is formed the aforementioned surface (281,282) with by the light beam which is reflected to be piled up at least partly mutually in the territory where it becomes the same emission direction. Suffering measurement ones (280) the suffering measuring plane (281,282) partly, the detector (90) image formation it does at least in the same lighting aspect this way, image formation it does for example in the image pickup vessel.