Supply and exhaust management control device for clean room

摘要

PROBLEM TO BE SOLVED: To provide an air supply and exhaust management control device for a clean room capable of preventing unintended inversion phenomenon of differential pressure.;SOLUTION: Static pressure sensors 31-34 are mounted on each of ducts 11-16 connected to a clean room 1. Air supply and exhaust devices 61-64 for supplying and exhausting the air through each of ducts 11-16 are respectively provided with program controllers 41-44. The predetermined necessary duct static pressure and the static pressure measured in each of the ducts 11-16 are made to agree with each other after reaching a plurality of predetermined intermediate static pressures by using the program controllers 41-44. Further an operation pattern can be selected by an operation pattern selecting device, and the necessary duct static pressure of each of ducts 11-16 defined by the selected operation pattern and the static pressure measured by each of the ducts 11-16 are made to agree with each other after reaching the predetermined single intermediate static pressure.;COPYRIGHT: (C)2008,JPO&INPIT