Being production manner of the phase die diffraction grating and the amplitude die diffraction grating which are used for the production mannered

摘要

PPROBLEM TO BE SOLVED: To provide manufacturing methods for an X-ray phase type diffraction grating and an X-ray amplitude type diffraction grating used for an X-ray Talbot interferometer. PSOLUTION: Both the diffraction gratings 11 and 12 are constituted by arranging metallic X-ray absorption parts 111 and 121 of 2 to 10 μm in width at equal intervals of 2 to 10 μm, and widths w1 and w2 and intervals g1 and g2 of the X-ray absorption parts 111 and 121 are equal between the X-ray phase type diffraction grating and X-ray amplitude type diffraction grating (w1=w1 and g1=g2). The phase type diffraction grating 11 is constituted to a thickness t1 of 1 to 5 μm and the amplitude type diffraction grating 12 is constituted to a thickness t2 of 25 to 100 μm. PCOPYRIGHT: (C)2006,JPO&NCIPI