TEST APPARATUS AND METHOD FOR TESTING A PLURALITY OF DEVICES, AND SEMICONDUCTOR WAFER LEVEL TEST DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a system and a method for obtaining statistical data by using a high-speed and simple method in a wafer level while using a wafer level test device.;SOLUTION: In the system and method, parallel stress is applied to all DUTs in an arbitrary chip to shorten stress time, and then while preventing the generation of relaxation by holding the other DUTs of the chip at a stressed state, each DUT of the chip can be individually tested. As one application, a negative temperature bias instability (NTBI) phenomenon of a transistor device can be analyzed by obtained statistical data. Although acquisition of statistical data may be extremely important for the NBTI in accordance with the size reduction of a device as the behavior of the NBTI is known, the structure and method can be used to apply stress to many DUTs in order to obtain reliability mechanisms of many techniques by means of minimal and appropriate adjustment.;COPYRIGHT: (C)2011,JPO&INPIT