Forming method for forming partition and spacer of electrophoretic display medium on substrate, and electrophoretic display medium formed by forming method of partition and spacer forming partition and spacer of electrophoretic display medium on substrate

摘要

In an electrophoretic medium (10), if there is a demand to lower the height of a partition (13) than that of a spacer (14), in order to make the difference in heights of the partition (13) and the spacer (14) more accurate, the partition (13) and the spacer (14) are formed on a first substrate (11) according to a method which includes a first resist application step where a first negative resist (31) is applied on the first substrate (11), a first exposure step where the first negative resist (31) is exposed to light through a first mask (140) having an aperture pattern (146) for exposing a pattern of the partition (13) to light, a second resist application step where a second negative resist (32) is applied on the first negative resist (31), a second exposure step where the second negative resist (32) and the first negative resist (31) are exposed to light through a second mask (150) having an aperture pattern (156) for exposing a pattern of the spacer (14) to light, and a development step where the first negative resist (31) and the second negative resist (32) are developed.