Conveyance device corresponding to conveyance robot transfer and transfer robot transfer method

摘要

To provide an apparatus that can transfer a conveyance robot 106 by inhibiting the increased size of a conveyance apparatus 104, by effectively utilizing the installation space of a clean ROOM 100, and at the same time by preventing the cost of equipment from being increased even if the size of the conveyance robot 106 becomes larger and to provide a method for transferring the conveyance robot 106. SOLUTION: A conveyance apparatus 4 has the conveyance robot 106 for conveying a substrate and a conveyance robot installation stage 7 for installing the conveyance robot 106, and at least one cassette stage 5 arranged ON the side of the conveyance robot installation stage 7. In the conveyance apparatus and conveyance robot transfer method and each cassette stage 5 comprises a process for removing a detachable type cassette stage 51 from the detachable conveyance robot transfer correspondence type conveyance apparatus 41 to the conveyance robot installation stage 7 and other cassette stages 51, and a process for carrying in and out the conveyance robot 106 from the side of the conveyance robot installation stage 7. The robot carrying-in-and-out apparatus 11 is used in the process for carrying in and out the conveyance robot 106.