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While the dual closed-loop control system null IC tip/chip in order to maintain the temperature of IC tip/chip
While the dual closed-loop control system null IC tip/chip in order to maintain the temperature of IC tip/chip
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机译:而双闭环控制系统将IC吸头/芯片置空以保持IC吸头/芯片的温度
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Topic There are times when the new temperature control system of IC tip/chip which copes with the technical problematical point of the system of the American patent 5,812,505th number, solves this is offered.SolutionsThe dual closed-loop control system while IC tip/chip loses the electric power of various quantities, maintains the temperature of IC tip/chip in nearly set temperature. The 1st feedback circuit, at the variable quantity which compensates the change of IC tip/chip electric power, supplies electric power to the electric heater. The 2nd feedback circuit, with the variable flow which makes the electrical amount used at the particular heater decrease which exceeds the electrical amount used which occurs when flow of the liquid refrigerant is fixed, supplies the particular liquid refrigerant to the particular evaporator which is connected to the heater. Selective figure Figure 1
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