Electrostatic deflection control circuit and electrostatic deflection control method of electron beam measuring device

摘要

PROBLEM TO BE SOLVED: To provide an electrostatic deflection control circuit of an electron beam measuring device, as well as an electrostatic deflection control method, in which high precision in measuring an electron beam can be attained and structural simplification of a device is obtained.;SOLUTION: In an analog calculating circuit 2x1 included in an analog calculating part 2 composing an electrostatic deflection circuit 100, output voltages of a multiplication unit 21x and a multipliction unit 21y are added and outputted by an adding unit 22. At a time of a low magnification, since an output of the adding unit 22 is driven to a relay driving circuit 24 and a side of a permanently closed contact 25 is closed, the output of the adding unit 22 is amplified at a high amplification rate by a high gain amplifier 23q and is impressed on an electrostatic deflection plate 3x1. At a time of a high magnification, a side of a permanently open contact 2a is closed and the output of the adding unit 22 is amplified at a low amplification rate by a low gain amplifier 23p and is similarly impressed on the electrostatic deflection plate 3x1.;COPYRIGHT: (C)2007,JPO&INPIT