Edge defect detection method, edge defect detection equipment, edge defect detection program, recording medium

摘要

PROBLEM TO BE SOLVED: To provide an edge defect detection method for automatically detecting edge defects appropriately.;SOLUTION: A display image is captured by a CCD camera in an imaging process ST100. A luminance value L_i for each captured pixel is calculated, based on data captured in the imaging process ST100 (luminance value calculation process ST110). In a luminance emphasis process ST140, the absolute value of the difference between the luminance value L_i in a captured pixel to be noticed and a luminance value L_i-1 in the captured pixel immediately above the luminance value L_i is calculated as a differential value D_i, and further the captured pixel adjacent to the captured pixel to be noticed is examined to search the maximum differential value D_max, and the searched maximum differential value D_max is added to the differential value D_i in the captured pixel to be noticed to calculate an emphasis differential value D'_i. The emphasis differential value D'_i of each captured pixel is compared with a prescribed luminance difference threshold D'_s, thus detecting the captured pixel in which the emphasis differential value D'_i is equal to or more than the luminance differential threshold D'_s as a defective section (defective section detection process ST150).;COPYRIGHT: (C)2007,JPO&INPIT