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Engineering method for defects and conductivity of the conductive nano-scale structure
Engineering method for defects and conductivity of the conductive nano-scale structure
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机译:导电纳米级结构的缺陷和导电性的工程方法
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摘要
The invention relates to a method for defect and conductivity engineering of an individual part in a conducting nanoscaled structure by generating heat-induced migration, melting, sputtering and/or evaporation of conductive material of the nanoscaled structure by directing a focussed electron beam on this individual part of the structure to be engineered. The invention further relates to the use of a secondary electron microscope having a filter for detecting back scattered electrons for such a method and a respective secondary electron microscope having such a filter for detecting back scattered electrons.
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