In the graphite component which is used for the degradation prevention mannered null silicon monocrystal pulling up device of the graphite component and the graphite

摘要

A graphite member utilized in a pulling device for pulling a silicon single crystal is provided. An edge part of the graphite member is rounded off which is exposed to a reactive gas. The graphite member may comprise: a plate part having a thickness of t wherein a curvature radius of r satisfies the formula: t/8rt/4.