Wavelength conversion optical system, the laser light source, exposure apparatus, mask inspection equipment, and processing equipment of high molecular crystal

摘要

From the fundamental of the P as 5 time wave is formed polarized light, 2 time wave formation optical element via 3 and 3 time wave formation optical element 4,5 time wave formation optical element 5, 2 time wave of the P polarized light is formed from the fundamental of the S polarized light, with 2 time wave formation optical element 9. The beam 5 time wave of the P polarized light which is faired and the fundamental of the aforementioned S polarized light and 2 time wave of the P polarized light are synthesized with dichroic mirror 10 by cylindrical lens, 7,8 incidence do in 7 time wave formation optical element 11. And, 7 time wave of the S polarized light is formed from 2 time wave and 5 time wave of the P polarized light, this, with the fundamental of the S polarized light incidence does in 8 time wave formation optical element and 12 is synthesized, 8 time wave of the P polarized light is formed. Because of this, 8 time wave can be formed in simpler optical system than former optical system.