Making use of the foreign material removal pressure sensitive adhesive sheet and the same sheet for the precise electronic parts and the same part central processing unit, remove the precise electronic parts and comes in contact with the same part central processing unit the foreign material which

摘要

PROBLEM TO BE SOLVED: To provide a pressure sensitive adhesive sheet 1 which can slect its adhesion according to its use and can simply and reliably remove foreign matters adhering to a precise electronic component 10 and a treatment apparatus of the precise electronic component 10 without causing the damage, corruption and contamination of the precise electronic component 10 and without obstructing a carrying in the treatment apparatus, ans to provide a method for removing the foreign matters by using the pressure sensitive adhesive sheet 1.;SOLUTION: The pressure sensitive adhesive layer 3 is formed of a pressure sensitive adhesive in which organic microbaloon 3a and reinforcement addition agent 3b are blended. The pressure sensitive adhesive layers 3 each having properties, that a cushion index is ≥1.50, a diameter of a dice nozzle is 1.0 mm, a temperature is 100°C and a plastic deformation flow rate under a discharge conditions of 20 kg loading is 10×10^-2 ml/sec, are formed on one or both sides of the sides of a supporting film 2, thereby obtaining the pressure sensitive adhesive sheet 1 for removing the foreign matters.;COPYRIGHT: (C)2006,JPO&NCIPI