It is provided inside the production device and its production mannered

摘要

PPROBLEM TO BE SOLVED: To provide an apparatus and a method for producing a carbon film enabling to safely form a carbon film on a wire material 12 on a large scale at a low cost. PSOLUTION: The apparatus is equipped with a chamber 10, a wire material 12 disposed in the chamber 10 and connected to a power source 13 for heating by energization. an alcohol feeding means 14 disposed at the chamber 10 and for spraying an alcohol 15 onto the surface of the wire material 12. The method comprises the steps of heating the wire material 12 by energization, spraying the alcohol 15 onto the surface of the wire material 12 by the alcohol feeding means 14 and forming the carbon film on the surface of the wire material 12. PCOPYRIGHT: (C)2006,JPO&NCIPI