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Processing method, processing apparatus, processing method and processing method of the photonic crystal of the diffractive optical element
Processing method, processing apparatus, processing method and processing method of the photonic crystal of the diffractive optical element
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机译:衍射光学元件的光子晶体的加工方法,加工装置,加工方法和加工方法
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摘要
PPROBLEM TO BE SOLVED: To provide a processing method for form processing with high accuracy. PSOLUTION: In the processing method, a material is processed to form a desired shape by irradiation of the coherent light with a strong intensity distribution emitted from a light source by modulating the phase, or the amplitude or both. The desired shape is divided into a plurality of images, a computer-composited hologram is calculated for each image, and a plurality of modulation patterns corresponding to the result are formed into a space light modulation element while being re-written into the time series. PCOPYRIGHT: (C)2006,JPO&NCIPI
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