Sulfuric acid recycling type cleaning and method of sulfuric acid recycling type cleaning system

摘要

PROBLEM TO BE SOLVED: To provide a washing system which uses persulfuric acid ions, the washing system being capable of efficient and secure washing while improving washing effect by making persulfuric acid ion density sufficiently high.;SOLUTION: The washing system is equipped with a washing device (washing tanks 1 and 2, a liquid spray nozzle liquid spray nozzle 2) which washes a washed material by using a persulfuric-acid-ion containing solution 16 as washing liquid, an electrolytic reaction device (electrolytic reaction tanks 20 and 25, and a DC power source 22) which generates persulfuric acid ions from sulfuric acid ions contained in the solution through electrolytic reaction to manufacture the persulfuric-acid-ion containing solution, a circulation line (return pipes 10a and 10b and feed pipes 11a and 11b) which circulates the persulfuric-acid-ion containing solution between the washing device and electrolytic reaction device, and a washing surface inspection device (a light emission and reception part 27 and a controller 28) which inspects a washed surface of the washed material.;COPYRIGHT: (C)2007,JPO&INPIT