A SULFURIC ACID RECYCLING TYPE CLEANING SYSTEM AND A SULFURIC ACID RECYCLING TYPE PERSULFURIC ACID SUPPLY APPARATUS

摘要

A SULFURIC ACID RECYCLING TYPE CLEANING SYSTEM AND A SULFURIC ACID RECYCLING TYPE PERSULFURIC ACID SUPPLY APPARATUS ABSTRACTA system for cleaning with persulfuric acid which makes it possible to enhance the persulfuric acid concentration and thereby attain higher cleaning effect and which permits the continuation of cleaning; and a feeder for feeding persulfuric acid into a cleaning apparatus. The feeder is provided with an electrolysis vessel (10) for forming persulfate ions by electrolysis from sulfate ions contained in a solution and thus regenerating a persulfuric acid solution, and lines (4), (5) and (6) for circulating apersulfuric acid solution between a cleaning tank (1) and the electrolysis vessel (10). The system is constituted of the above feeder and a cleaning tank (1) for cleaning a member (30) to be cleaned by the use of a persulfuric acid (2) as the cleaning fluid. Figure 1