Electrostatic force detector with a cantilever for electrostatic force microscope

摘要

(57) Abstract The device which is in the midst of the test (40) in the cantilever die sensor which receives the influence of the electrostatic vigor which is given by electric charge (12) the nuclear energy microscope which is used. As for the cantilever sensor it is desirable to be formed from nickel foil. Electric charge distribution and both of thickness of the sample are displayed in the 3D graph.