Apparatus and method for measuring the concentration level of oxygen apparatus and method for measuring the concentration level of impurities in the input gas stream, the input gas stream

摘要

As for the device and the method of quantizing the impurity inside the input gases style, density of that detection possible type is measured making use of the catalyst which converts the impurity, to the detection possible type inside output gases style, after that, by the detector. Because of this, high level sensitivity is achieved to analysis of the impurity inside the gases style.