Method for optimizing inspection speed without sacrificing the quality of the focusing signal to noise ratio, resolution or, in the application of light of fluorescent light and weak

摘要

In the use of strong light, weak light, and light of fluorescence, the method of optimizing the inspection speed which is in the midst of optical inspecting of the element. When automatic focus mechanism and the high-speed CCD camera combining with the high numerical aperture (NA) optical part, speed efficiency of signal anti- noise ratio, resolution, and the inspection which are superior is achieved, the method of being optimized vis-a-vis fluorescence and non fluorescent use is stated.