Method and apparatus for integrating near real-time defect detection into an APC framework

摘要

A method and apparatus for providing near real-time fault detection in a manufacturing process is provided. The apparatus includes a processing tool adapted to manufacture a processing piece and an interface, coupled to the processing tool, for receiving operational data from the processing tool related to the manufacture of the processing piece. In one embodiment, the processing tool is in the form of semiconductor fabrication equipment and the processing piece is a silicon wafer. A fault detection unit is provided to determine if a fault condition exists with the processing tool. An Advanced Process Control (APC) framework is further provided to receive the operational data from the first interface, and to send the data to the fault detection unit as the data is received by the first interface.