The aspect of desire of 1st target ones and the aspect

摘要

PROBLEM TO BE SOLVED: To hold the positions of two objects with high precision and remove the air between the planes of the two objects in contact in a short time.;SOLUTION: The first object 1 and the second object 2 laid on top of each other in the atmospheric pressure atmosphere are held by an object pressing portion 10 inside a chamber 3. The first object 1 and the second object 2 are turned from a completely contact state into such a state that the peripheries are partially separated by suction by suction tubes 12. Then, the chamber 3 is decompressed. When the decompression of the chamber 3 advances, and the pressure inside the chamber 3 becomes the same as the pressure at which the suction tubes 12 suck the first object 1; the first object 1 separates from the suction tubes 12 and becomes contact with the second object 2 again. By this method, the air between the planes of the first and second objects 1 and 2 can be removed without any positional shift between the first and second objects 1 and 2 in the decompressed atmosphere.;COPYRIGHT: (C)2007,JPO&INPIT