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摘要

PROBLEM TO BE SOLVED: To provide a semiconductor sensor capable of suitably securing its sensing accuracy in sensing a predetermined physical quantity by using a resistor; and its manufacturing method.;SOLUTION: On a semiconductor substrate 10, a silicon oxide film 20 is formed. On the silicon oxide film 20, an upstream-side heater Rha, a downstream-side heater Rhb, lead parts L2 and L5 and an upstream-side thermometer Rka are respectively formed. The upstream-side heater Rha, the downstream-side heater Rhb, the lead parts L2 and L5 and the upstream-side thermometer Rka are covered with a silicon nitride film 40. In this case, all of the upstream-side heater Rha, the downstream-side heater Rhb, the upstream-side thermometer Rka and the lead parts L2 and L5 are each formed with a semiconductor film. Regions within the semiconductor films constituting the upstream-side heater Rha, the downstream-side heater Rhb, and the upstream-side thermometer Rka are locally formed into thin films.;COPYRIGHT: (C)2009,JPO&INPIT