Being the standard scale and the standard scale which is used the production manner

摘要

PROBLEM TO BE SOLVED: To provide a reference scale capable of determining an accurate position.;SOLUTION: The reference scale 10 includes a heat resistant board 11 having reference holes 11a in prescribed intervals, a base material part 12 filled in each of the holes 11a of the board 11 and having permeability to X-ray different from the board 11, and a metallic layer 13 arranged on one surface of the base material part 12 with prescribed accurate intervals, having permeability to X-ray different from the base material part 12 and relatively formed thinly. By this constitution, accuracy of the position of an X-ray image of the reference scale 10 with respect to the metallic layer 13 is higher than the conventional one, and the position can be accurately determined.;COPYRIGHT: (C)2009,JPO&INPIT