Surface shape measurement for a stylus profilometer and automatic calibration method thereof

摘要

PROBLEM TO BE SOLVED: To provide a method for calibration of force to be performed automatically in a short time after changing the probe for the probe type step profiler and a probe type step profiler provided with the automatic calibration function.;SOLUTION: The method obtains the relationship between the current flowing through the coil of the needle pressure generation device and the needle pressure of the probe, from this relationship, the fluctuation of the needle pressure of the probe is automatically calibrated. In the probe type step profiler provided with automatic calibration function is provided with a computer means for automatically calibrating the fluctuation of the needle pressure from the previously obtained relationship between the current flowing through the coil of the needle pressure generation device and the needle pressure.;COPYRIGHT: (C)2007,JPO&INPIT