The process which forms the higher stratum of society film which includes

摘要

PPROBLEM TO BE SOLVED: To realize a shading characteristic which is excellent even at a module with a small ejection pupil diameter. PSOLUTION: Wiring and an interlayer insulating film are laminated on a semiconductor substrate where a pixel allay is installed. When an insulating film (protection film) on the uppermost layer is to be formed, a curve face in a three-dimensional curve shape dented on the center side of the pixel array is formed on the upper face of the uppermost layer. An on-chip micro lens is formed along the curve face. Thus, a distance between each pixel of the pixel array and the on-chip micro lens is made to be small on the center side of the pixel array, and to be large on the peripheral side of the pixel array. A pupil in a three-dimensional direction is corrected. In the forming method of the curve face, the curve face can be formed, for example, by using a difference of a polishing rate in a process for polishing the upper face of the upper layer film by a CMP method and flattening it. PCOPYRIGHT: (C)2006,JPO&NCIPI