Total reflection attenuation type far-ultraviolet spectroscopy and the density measurement equipment which uses that

摘要

It is decided in the total reflection attenuation type far-ultraviolet spectra, wave length of far-ultraviolet light, refractive index of the measuring object and refractive index of the optical material of the total reflection attenuation probes, by the incidence angle of ultraviolet light to the boundary of the probe and the measuring object, entering depth of the ebanetsusento wave of total reflection lights total reflection lights are measured in the measurement wave length range of the far-ultraviolet limits as above 150nm. Here, it enters and in order for depth to be above 150nm, it makes the measuring object the boundary of the total reflection attenuation probes contact making use of the total reflection attenuation probes which were drawn up with the optical material which possesses the refractive index which is selected, far-ultraviolet light, it enters and depth is above 150nm, in incidence angle and the measurement wave length range above burble angle incidence it does in the boundary, measures the total reflection lights from the boundary, calculates the absorbency of the measuring object.