Being the Faraday cup device which has the Faraday cup which detects the beam current density

摘要

PROBLEM TO BE SOLVED: To fine adjust dose amount with no degradation of operating rate by allowing change of the actual value of beam current density with no change in the set value of beam current density, relating to an ion doping equipment in which the beam current density of ion beam is detected with a Faraday cup 31 that receives a part of ion beam, while an ion source is controlled by a control means 40 so that the detected value of the Faraday cup 31 comes to be a set value on the basis of a preset condition.;SOLUTION: A semiconductor thin film is provided to the receiving surface of the Faraday cup 31. The temperature of semiconductor thin film is changed to change conductivity of the semiconductor thin film, thus allowing changing of detection sensitivity of the Faraday cup 31.;COPYRIGHT: (C)2006,JPO&NCIPI