A droplet discharge head, a droplet ejection apparatus, the manufacturing method of preparation and the droplet ejection apparatus of the droplet discharge head

摘要

PROBLEM TO BE SOLVED: To provide a liquid droplet discharge head which enables high density of nozzles, and can prevent pressure interference between the nozzles, and to provide a liquid droplet discharge head manufacturing method.;SOLUTION: An ink jet head 10 is provided with at least a nozzle substrate 1, a cavity substrate 3 having a discharge chamber 31, and a reserver substrate 2 having a reserver recess 23a serving as a reserver 23. The ink jet head has a resin thin film 111 which is not formed on a contact surface of the reserver substrate 2 to the nozzle substrate 1 or the cavity substrate 3, and formed by film formation on the entire inner surface of the reserver recess 23a. Then part of a bottom surface of the reserver recess 23a is formed of the resin thin film 111 which functions as a diaphragm portion 100 for cushioning pressure variation.;COPYRIGHT: (C)2008,JPO&INPIT