The sample holder and the survey instrument and the mount section which possesses

摘要

PROBLEM TO BE SOLVED: To solve the problem that dust floating towards a sample cannot be removed and an electric circuit is damaged fatally as seen in a short circuit or the like between circuit patterns in a method for removing dust using an electrostatic attraction.;SOLUTION: A sample holder has a placing base 12 with the placed sample 11 for an inspection or an observation; a first electrode 13 applying a positive or negative voltage to a reference potential to the sample 11; and a second electrode 18 to which a voltage having a reverse value to the positive or negative voltage to the applied voltage of the first electrode 13 and having the same as or larger than an absolute value is applied, and which is arranged around the placing base 12 while being separated from the first electrode 13. Dust intended towards the inside of the second electrode 18 and being charged in the same code as the second electrode 18 receives an electrostatic repulsive force by the sample holder, and is returned outside the second electrode 18, thus reducing the attraction of dust onto the sample 11.;COPYRIGHT: (C)2007,JPO&INPIT