Hydrogen gas sensing element, hydrogen gas detection method and hydrogen gas sensor

摘要

PROBLEM TO BE SOLVED: To provide a hydrogen gas sensing element excellent in sensitivity, response and selectivity with respect to a hydrogen gas of low concentration even at a low element temperature and also excellent in productivity and safety, a hydrogen gas sensor having the hydrogen gas sensing element and a hydrogen gas sensing method using the hydrogen gas sensor.;SOLUTION: The hydrogen gas sensing element is constituted by providing a thin film 12 based on titanium oxide, which satisfies resistance change characteristics of R₁₀₀₀/R₀≤0.9 (wherein R₀ is an electric resistance value at a measuring temperature of 100°C and a hydrogen gas concentration of 0 ppm and R₁₀₀₀ is an electric resistance value at a measuring temperature of 100°C and a hydrogen gas concentration of 1,000 ppm), on a substrate 11. The hydrogen gas sensor 20 has the hydrogen gas sensing element, a heater and, if necessary, an ultraviolet ray source 28 and can sense the hydrogen gas of low concentration with high sensitivity at an element temperature of 30-150°C.;COPYRIGHT: (C)2006,JPO&NCIPI