Graphite nanofiber thin film formation for thermal CVD apparatus

摘要

PROBLEM TO BE SOLVED: To constitute a thermal CVD system for graphite nanofiber thin film deposition so that a gaseous mixture of carbon-containing gas and gaseous hydrogen for use in the thin film deposition process can be reused to decrease the consumption of a gaseous mixture of the carbon-containing gas and the gaseous hydrogen and the running cost of the system can be reduced. SOLUTION: An exhaust gas circulation means 21 is provided to a vacuum chamber 12 to which a gaseous mixture supply system 18 for introducing the gaseous mixture of the carbon-containing gas and the gaseous hydrogen into the vacuum chamber is connected. In this case, the exhaust gas circulation means is constituted so that H2O in the exhaust gas exhausted from the vacuum chamber can be trapped and the exhaust gas from which H2O is removed can be returned to the gaseous mixture supply system and reused.