Measuring the pattern of the sample survey instrument

摘要

PROBLEM TO BE SOLVED: To provide an efficient inspection by preventing the occurrence of false defects caused by a position alignment error.;SOLUTION: A sample inspection device includes a measurement image generating section for generating a measurement image by measuring a sample pattern; a comparator for comparing the measuring image with a reference image and determining a sample being defective when the difference between them exceeds a threshold; a position displacement measuring section for measuring a displacement amount between area images with a fixed area that are segmented from the measuring image and the reference image and determining reliability information indicating the reliability of the position displacement amount between them; and a position aligning section for aligning the positions of the area images using the reliability information and the position displacement amount.;COPYRIGHT: (C)2009,JPO&INPIT