Applying the x-ray to the surface of three-dimensional structure analysis

摘要

PROBLEM TO BE SOLVED: To provide a means capable of accurately, simply and rapidly obtaining three-dimensional information of a multilayer structure with an X-ray as a probe in a three-dimensional structure analysis of the multilayer structure. ;SOLUTION: An apparatus 100 for analyzing the three-dimensional structure comprises an X-ray source 101, an X-ray converging element 102 for converging the X-ray 10 generated from the source 101 on a sample S, an X-ray scanning mechanism 103, a sample stage 104 for mounting the multilayer structure as the sample, a transmitted X-ray detector 10 for detecting the transmitted X-ray, a reflecting side fluorescent X-ray detector 106 for detecting a fluorescent X-ray generated at the reflecting side, a transmitted side fluorescent X-ray detector 107 for detecting the fluorescent X-ray generated at the transmission side, and a control arithmetic unit 108 for controlling the mechanism 103 and obtaining three-dimensional information of the structure based on detected values of the detector 105, the detector 106, the detector 107 to image-process the information.;COPYRIGHT: (C)2003,JPO