The multiple plasma generation nozzles which blow out the atmospheric pressure plasma generator

摘要

PROBLEM TO BE SOLVED: To evenly perform plasma irradiation on an irradiation target of wide area even when a plasma generating nozzle of a small diameter having a spotted type blow-out port, which is inexpensive and easy to control, is used in the plasma generating device used for a workpiece treatment or the like such as reforming of a substrate.;SOLUTION: To the tip of the plasma generation nozzle 31, an adaptor 38 to convert the spotted type blow-out port to a lengthy blow-out port 387 is attached, furthermore, a cover member 93 to cover a plurality of plasma generating nozzles 31 is installed, and a narrow space is formed between the cover member 93 and the workpiece so that the plasma which is blown out from the outlet nozzle and rebounded after colliding with the workpiece is pushed back again and made to stay in the space. Accordingly, the even plasma irradiation can be carried out on the workpiece of a large area, and cooling of the plasma can be suppressed in the space, the plasma can be arranged to survive for a comparatively long period of time (disappearing percentage is reduced), and irradiation efficiency can be enhanced.;COPYRIGHT: (C)2009,JPO&INPIT