Inspection method and the survey instrument which are based on the photographing picture

摘要

Topic It is the inspection method of being possible to inspect the state of the membrane and the defective part etc in the surface of the suffering inspection body on the basis of the photographing picture precision better and to offer the survey instrument.SolutionsWhile at white light L from the illumination section _O illuminating the surface of suffering inspection body 10, the surface of suffering inspection body 10 photographing with photographing section, 100 it becomes the constitution which acquires the plural photographing pictures on the basis of the light LR of a polarized light state where you acquire the photographing picture, being inspection method and the survey instrument which inspect the state of the surface of suffering inspection body 10 on the basis of the said photographing picture, from the region where suffering inspection body 10 illuminates you change the polarized light state of the light L _{R which} incidence is done into photographing section, 100 incidence do in the aforementioned photographing section and 100 differ. Selective figure Figure 1