首页> 外国专利> PRESSURE CONTROL VALVE DRIVING CIRCUIT FOR PRESSURE TYPE FLOW RATE CONTROL DEVICE WITH FLOW RATE SELF-DIAGNOSIS FUNCTION

PRESSURE CONTROL VALVE DRIVING CIRCUIT FOR PRESSURE TYPE FLOW RATE CONTROL DEVICE WITH FLOW RATE SELF-DIAGNOSIS FUNCTION

机译:具有流量自诊断功能的压力式流量控制装置的压力控制阀驱动电路

摘要

A pressure control valve piezoelectric element driving circuit is provided for a pressure type flow rate control device provided with a flow rate self-diagnosis function for comparing initial pressure drop characteristics data measured and with pressure drop characteristics data in a flow rate diagnosis which are measured under conditions that are the same for both measurements to detect malfunction in flow rate control from a difference between both characteristics data, wherein a first discharge circuit slowly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a step-down command signal from a CPU, through a step-down command circuit to step down the voltage, and a second discharge circuit that rapidly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a high-speed step-down command signal from the CPU, through a high-speed step-down command circuit to step down the voltage.
机译:为压力型流量控制装置提供压力控制阀压电元件驱动电路,该压力型流量控制装置具有流量自诊断功能,该流量自诊断功能用于将所测量的初始压降特性数据与在流量诊断中测得的压降特性数据进行比较。在两个测量条件相同的条件下,根据两个特性数据之间的差来检测流量控制故障,其中,第一放电电路根据降压指令信号,缓慢降低施加到压电元件的压电元件驱动电压CPU,通过降压指令电路使电压降压,以及第二放电电路,该第二放电电路根据来自CPU的高速降压指令信号,快速释放施加到压电元件的压电元件驱动电压。高速降压指令电路使电压降压。

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