PRESSURE CONTROL VALVE DRIVING CIRCUIT FOR PRESSURE-TYPE FLOW RATE CONTROL APPARATUS WITH FLOW RATE SELF-DIAGNOSIS FUNCTION

摘要

The invention installed revocation circuit (8) for high-speed abolish the control valve to the drive circuit in parallel with the control according to the flow rate a piezo element for the pressure control valve drive of the pressure type flow rate control apparatus having a self-diagnosis circuit (5) and, the flow rate and the diagnostic result of the high accuracy is obtained when the flow rate self-diagnosis by decreasing the time delay abolition of the valve at the time of self-diagnosis.