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TEST STRUCTURE FOR HIGHLY ACCELERATED ELECTROMIGRATION TESTS FOR THICK METALLIZATION SYSTEMS OF SOLID INTEGRATED CIRCUITS

机译：固态集成电路厚金属化系统的高速电沉积测试的测试结构

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摘要

A test structure and a process for the electromigration test of integrated circuits is suggested, in which metallization planes consisting of strip conductors of a usual thickness (11) are connected with metallization planes consisting of substantially thicker strip conductors (12) as they are required for the connection of components of higher performance.

机译：提出了用于集成电路的电迁移测试的测试结构和方法，其中将由通常厚度（ 11 ）的带状导体组成的金属化平面与由实质上较厚的带状导体组成的金属化平面（ 12 ），因为它们是连接更高性能的组件所必需的。 展开▼

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公开/公告号US2011037477A1

专利类型

公开/公告日2011-02-17

原文格式PDF

申请/专利权人 VERENA HEIN;
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申请/专利号US20070446483

发明设计人 VERENA HEIN;
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申请日2007-10-19

分类号G01N27/62;

国家 US

入库时间 2022-08-21 18:14:54

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3. Test structure for highly accelerated electromigration tests for thick metallization systems of solid state integrated circuits [P] . 美国专利： US8836342B2 . 2014-09-16

机译：用于固态集成电路的厚金属化系统的高度加速电迁移测试的测试结构

4. TEST STRUCTURE FOR HIGHLY ACCELERATED ELECTROMIGRATION TESTS FOR THICK METALLIZATION SYSTEMS OF SOLID INTEGRATED CIRCUITS [P] . 世界知识产权组织专利： WO2008046925A1 . 2008-04-24

机译：固态集成电路厚金属化系统的高速电沉积测试的测试结构

5. Test structure for highly accelerated electromigration tests for thick metallization systems from solid body circuits [P] . 德国专利： DE102006049791A1 . 2008-04-30

机译：用于固体电路厚金属化系统的高度加速电迁移测试的测试结构

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