VIBRATING NANO-SCALE OR MICRO-SCALE ELECTROMECHANICAL COMPONENT WITH ENHANCED DETECTION LEVEL

摘要

A vibrating nano-scale or micro-scale electromechanical component including a vibrating mechanical element that cooperates with at least one detection electrode. The detection electrode is flexible and is configured to vibrate in phase opposition relative to the vibrating mechanical element. Such a component may find, for example, application to resonators or motion sensors.