首页> 外国专利> PRESSURE SENSOR, SENSOR PROBE COMPRISING A PRESSURE SENSOR, MEDICAL APPARATUS COMPRISING A SENSOR PROBE AND A METHOD OF FABRICATING A SENSOR PROBE

PRESSURE SENSOR, SENSOR PROBE COMPRISING A PRESSURE SENSOR, MEDICAL APPARATUS COMPRISING A SENSOR PROBE AND A METHOD OF FABRICATING A SENSOR PROBE

机译：压力传感器，包括压力传感器的传感器探头，包括传感器探头的医疗设备以及制造传感器探头的方法

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摘要

The invention relates to a pressure sensor comprising a flexible membrane deformable in response to a pressure, which covers a cavity (2) and which comprises a strain gauge (21) that produces signals corresponding to the deformation of the flexible membrane, wherein the flexible membrane is a flexible monolithic integrated circuit foil (10). In this way the semiconductor integrated circuit itself serves as the flexible membrane, leading to a less complex fabrication process.

机译：压力传感器技术领域本发明涉及一种压力传感器，其包括响应于压力可变形的柔性膜，其覆盖腔体（ 2 ）并且包括应变计（ 21 ），该应变计产生压力。信号对应于柔性膜的变形，其中柔性膜是柔性单片集成电路箔（ 10 ）。以此方式，半导体集成电路本身用作柔性膜，从而导致制造工艺的复杂性降低。 展开▼

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公开/公告号US2011094314A1

专利类型

公开/公告日2011-04-28

原文格式PDF

申请/专利权人 RONALD DEKKER;FREDERIK VAN DER GRAAF;JOHANNES F.M. VELTHUIS;JAAP R. HAARTSEN;
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申请/专利号US20080674439

发明设计人 RONALD DEKKER;FREDERIK VAN DER GRAAF;JOHANNES F.M. VELTHUIS;JAAP R. HAARTSEN;
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申请日2008-08-19

分类号G01L1/22;

国家 US

入库时间 2022-08-21 18:14:01

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