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Application of 2-dimensional photonic crystals in alignment devices
Application of 2-dimensional photonic crystals in alignment devices
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机译:二维光子晶体在对准装置中的应用
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摘要
Alignment marks for use on substrates. In one example, the alignment marks consist of periodic 2-dimensional arrays of structures, the spacing of the structures being smaller than an alignment beam but larger than an exposure beam.
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