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METHOD FOR CORRECTING SPEED DEVIATIONS BETWEEN ACTUAL AND NOMINAL PULL SPEED DURING CRYSTAL GROWTH
METHOD FOR CORRECTING SPEED DEVIATIONS BETWEEN ACTUAL AND NOMINAL PULL SPEED DURING CRYSTAL GROWTH
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机译:修正晶体生长过程中实际和名义拉速之间的速度偏差的方法
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摘要
A system and method correct crystal pulling motor speed deviations in a crystal pulling mechanism. In a first embodiment, a processor implements a tracking filter by estimating new filter state based on previous state and the since-then-travelled nominal distance, and then updating the filter state based on estimation error and filter gains which are also functions of the travelled nominal distance. In a second embodiment, a harmonic tracking filter suppresses residual harmonic modulation and allows a short time constant. Rapid variations of pulling speed may thus be corrected.
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