METHOD OF MAKING A SEMICONDUCTOR CHIP ASSEMBLY WITH A POST/BASE/FLANGE HEAT SPREADER AND A CAVITY IN THE FLANGE

摘要

A method of making a semiconductor chip assembly includes providing a post and a base, mounting an adhesive on the base including inserting the post into an opening in the adhesive, mounting a first conductive layer on the adhesive including aligning the post with an aperture in the first conductive layer, then flowing the adhesive between the post and the first conductive layer, solidifying the adhesive, then etching the post to form a first cavity in the adhesive above the post, depositing a second conductive layer into the first cavity to form a second cavity that extends into the first cavity, providing a conductive trace that includes a pad, a terminal and a selected portion of the first conductive layer, providing a heat spreader that includes the post, the base and a flange that includes a selected portion of the second conductive layer that defines the second cavity, mounting a semiconductor device on the flange in the second cavity, electrically connecting the semiconductor device to the conductive trace and thermally connecting the semiconductor device to the heat spreader.